Amine/strong acid and alkali online monitoring/semiconductor monitoring

GR IonPa On-line IC System

  • Built-in calibration device
  • MDL < 1ppb
  • RSD < 10%
  • Comes with a cleaning device

Precision > Detection limit verification  (HCl@0.008μg/L measurement test results)  

Blank residue/zero degree offset - virtually no residue ( <0.0005ug/L)